ocivm.com > Spectroscopy Instrumentation > Electron Guns / Ion Sputtering Guns

Electron Guns / Ion Sputtering Guns


Electron Gun: G10 Series

Features:

  • Miniature Lens Design
  • Variable Beam Diameter
  • Variable Beam Energy
  • Low Outgassing Rate
  • Flexible Mounting Configuration

Specifications:

For specifications, please visit the Electron Gun G10 product page.

Electron Gun G10 Series
Electron Gun G10 Series

Ion Sputtering Gun: Model IG35 IONEC

The IONEC will meet your requirements for high performance sputter ion gun while maintaining simplicity in its design and an unprecedented economy in its use of vacuum chamber space.

The IONEC, a miniature ion sputtering gun, is an instrument designed for cleaning sample surfaces and depth profiling for Auger Electron Spectroscopy. The gun produces a uniform, high density, inert gas ion beam with a beam diameter from 5 to 10mm. The IONEC IG35 combines an enhanced ion source with an electrostatic lens configuration for accelerating and focusing the ion beam. The entire device is mounted on a mini CF flange. The gun has a port to admit gas directly into the ionization region and a port to differentially pump the lens region. This will maximize the pressure differential between the main chamber an the ion source.

Features:

  • enhanced ion source for increased beam intensity
  • mini CF flange mounting
  • direct gas inlet to ion source
  • port for differential pumping
  • direct filament mounting on the mini CF flange feedthrough
  • variable beam energy from 0 to 3keV, digital panel meters, remote control of beam energy and computer programming

Specifications:

For information about specifications, please visit the Ion Sputtering Gun: Model IG35 IONEC product page.


Ion Sputtering Gun: Model IG70 IONEC

The IONEC Model IG70 will meet your requirements for high performance sputter ion gun while maintaining simplicity in its design and an economy in its use of vacuum chamber space.

The IONEC, a miniature ion sputtering gun, is an instrument designed for cleaning sample surfaces and depth profiling for Auger Electron Spectroscopy. The gun produces a uniform, high density, inert gas ion beam with a beam diameter from 5 to 20mm. The IONEC IG70 combines an enhanced ion source with an electrostatic lens configuration for accelerating and focusing the ion beam. The entire device is mounted on a 23/4" CF flange. The gun has a port to admit gas directly into the ionization region and a port to differentially pump the lens region. This will maximize the pressure differential between the main chamber an the ion source.

Features:

  • enhanced ion source for increased beam intensity
  • 2 3/4" CF flange mounting
  • direct gas inlet to ion source
  • port for differential pumping
  • direct filament mounting on the 23/4" CF flange feedthrough
  • variable beam energy from 0 to 3keV, digital panel meters, remote control of beam energy and computer programming

Specifications:

For information about specifications, please visit the Ion Sputtering Gun: Model IG70 IONEC product page.

Ion Sputtering Gun IG70 IONEC
Ion Sputtering Gun IG70 IONEC