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Low Energy Electron Diffraction & Auger Electron Spectroscopy Data


Crystal Substrates > Ga2O3-β (010) - Gallium Oxide

  • Material: Gallium Oxide
  • Size: 5 × 5 × 0.5 mm
  • Orientation: (010)
  • Structure: Monoclinic
  • Lattice Constant: a = 12.23 Å, b = 3.04 Å, c = 5.80 Å
  • Type/Dopant: Undoped
  • Growth Method: Czochralski
  • Melting Temperature: 1900 °C
  • Debye Temperature: 600 °C [Ref. 3]
  • Surface Debye Temperature: Unpublished
  • Characterization Tool: LEED-AES
    Model LEED 800
  • UHV Treatment: Annealing at 570 °C (estimated temperature of sample) for 15 minutes
  • Applications: Emerging uses in sensors, power electronics and semiconductor electronics

LEED Patterns Before Sputtering

Ga2O3-β (010) - LEED Pattern 50 eV
Ga2O3-β (010) - LEED Pattern 50 eV
Ga2O3-β (010) - LEED Pattern 110 eV
Ga2O3-β (010) - LEED Pattern 110 eV
Ga2O3-β (010) - LEED Pattern 155 eV
Ga2O3-β (010) - LEED Pattern 155 eV

LEED Pattern After Sputtering (for 30 minutes at 1.0 keV) and Annealing

Ga2O3-β (010) - LEED Pattern 40 eV
Ga2O3-β (010) - LEED Pattern 40 eV
Ga2O3-β (010) - LEED Pattern 110 eV
Ga2O3-β (010) - LEED Pattern 110 eV
Ga2O3-β (010) - LEED Pattern 155 eV
Ga2O3-β (010) - LEED Pattern 155 eV

Ga2O3-β 010 - AES Spectrum - Before

Ga2O3-β (010) - AES Spectrum
Ga2O3-β 010 - AES Spectrum - Before

Ga2O3-β 010 - AES Spectrum - After

Ga2O3-β (010) - AES Spectrum
Ga2O3-β 010 - AES Spectrum - After

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